Packer/Unparker

           PP.Box type: Packaging and unpackaging for sizes up to G5.

           Tray type: Packaging and unpackaging for sizes above G6.

           Dense pack: Packaging and unpackaging for dense packs with sizes above G6.

 Sputter Handling system

           Vertical Sputter: Loading and unloading wafers.

           Horizontal Sputter: Loading and unloading wafers.

           Batch Sputter: Loading and unloading wafer holders.

  Robot LD/ULD  system 

           Tray to Conveyor: Loading and unloading wafers.

           Cassette to Conveyor: Loading and unloading wafers.

  ROBOT System系統規劃

           Mitsubishi Electric Robot

           Kawasaki Heavy Industries Robot

           Yaskawa Robot

           KUKA Robot

           FANUC Robot

           EPSON Robot